Prof. Hiroo Kinoshita
at Univ of Hyogo
SPIE Involvement:
Publications (55)

Proceedings Article | 11 September 2020 Presentation
Proc. SPIE. 11514, Laser-induced Damage in Optical Materials 2020
KEYWORDS: Femtosecond phenomena, Silica, Glasses, Laser induced damage, High power lasers, X-rays, Dielectrics, Laser damage threshold, X-ray lasers, Laser systems engineering

Proceedings Article | 18 March 2016 Paper
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Mirrors, Contamination, Metals, Germanium, Silicon, Hydrogen, Reflectivity, Extreme ultraviolet, Aluminum, Extreme ultraviolet lithography, Chemical elements, Zirconium

SPIE Journal Paper | 18 February 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Extreme ultraviolet, Microscopes, Diffraction, Extreme ultraviolet lithography, Photomasks, CCD cameras, Phase imaging, Scatterometry, Reflection, Coherence imaging

Proceedings Article | 9 November 2015 Paper
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Microscopes, Diffraction, Coherence imaging, Phase contrast, Reflection, CCD cameras, Phase imaging, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Reconstruction algorithms

Proceedings Article | 9 July 2015 Paper
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Microscopes, Diffraction, Mirrors, CCD cameras, Scatterometry, 3D metrology, Relays, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Showing 5 of 55 publications
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