Mr. Hiroto Nozawa Profile

Hiroto Nozawa

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Publications (2)

Proceedings Article | 28 March 2017 Paper

High throughput and dense sampling metrology for process control

Lei Sun, Tsunehito Kohyama, Kuniaki Takeda, Hiroto Nozawa, Yuji Asakawa, Taher Kagalwala, Granger Lobb, Frank Mont, Xintuo Dai, Shyam Pal, Wenhui Wang, Jongwook Kye, Francis Goodwin

Proceedings Volume 10145, 101452D (2017) https://doi.org/10.1117/12.2258623

KEYWORDS: Process control, Metrology, Optical metrology, Defect inspection, Inspection, Semiconducting wafers, Critical dimension metrology, Finite element methods, Wafer-level optics, Line edge roughness, Lithography, Optics manufacturing

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Proceedings Article | 11 May 2009 Paper

Phase-shift/transmittance measurements in a micro pattern using MPM193EX

Hiroto Nozawa, Takayuki Ishida, Satoru Kato, Osamu Sato, Koji Miyazaki, Kiwamu Takehisa, Naoki Awamura, Hideo Takizawa, Hal Kusunose

Proceedings Volume 7379, 737925 (2009) https://doi.org/10.1117/12.824318

KEYWORDS: Phase measurement, Transmittance, Photomasks, Signal detection, Lithography, Distance measurement, Interferometers, Image processing, Charge-coupled devices, Objectives

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