Prof. Hiroyuki Fujita
Director CIRMM at Univ of Tokyo
SPIE Involvement:
Author
Publications (40)

Proceedings Article | 13 October 2006 Paper
Proc. SPIE. 6376, Optomechatronic Micro/Nano Devices and Components II
KEYWORDS: Microelectromechanical systems, Mirrors, Beam splitters, Modulation, Sensors, Optical coherence tomography, Scanners, Solar cells, Endoscopes, Tissue optics

Proceedings Article | 6 December 2005 Paper
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Actuators, Electronics, Particles, Molecules, Silicon, Electron microscopes, Scanning electron microscopy, Palladium, Scanning transmission electron microscopy, Molecular electronics

Proceedings Article | 23 February 2005 Paper
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Microelectromechanical systems, Actuators, Image compression, Microsystems, Sensors, Field programmable gate arrays, Control systems, CCD cameras, Microactuators, Mobile robots

Proceedings Article | 25 October 2004 Paper
Proc. SPIE. 5604, Optomechatronic Micro/Nano Components, Devices, and Systems
KEYWORDS: Etching, Dry etching, Electrodes, Molecules, Silicon, Photography, Scanning electron microscopy, Wet etching, Fluorine, Molecular electronics

Proceedings Article | 16 August 2004 Paper
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Nanotechnology, Microscopes, Molecules, Silicon, Transmission electron microscopy, Silicon films, Reactive ion etching, Anisotropic etching, Nanolithography

Showing 5 of 40 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 10 March 1999

SPIE Conference Volume | 10 March 1999

Conference Committee Involvement (7)
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
13 December 2004 | Sydney, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics
10 December 2003 | Perth, Australia
Smart Sensors, Actuators, and MEMS
19 May 2003 | Maspalomas, Gran Canaria, Canary Islands, Spain
Design, Test, Integration, and Packaging of MEMS/MOEMS
9 May 2000 | Paris, France
Showing 5 of 7 Conference Committees
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