Mr. Hiroyuki Tanizaki Profile

Hiroyuki Tanizaki

at KIOXIA Corp

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Measurability analysis of the HAR structure in 3D memory by T-SAXS simulation

Kaori Sasaki, Takaki Hashimoto, Yenting Kuo, Hiroshi Tsukada, Hiroyuki Tanizaki

Proceedings Volume 11611, 116110U (2021) https://doi.org/10.1117/12.2582070

KEYWORDS: X-rays, 3D metrology, X-ray imaging, Scattering, Process control, Nondestructive evaluation, 3D modeling, X-ray diffraction, Shape analysis, Semiconductors

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Proceedings Article | 20 August 2004 Paper

257-nm wavelength mask inspection for 65-nm node reticles

Ryoji Yoshikawa, Hiroyuki Tanizaki, Tomohide Watanabe, Hiromu Inoue, Riki Ogawa, Satoshi Endo, Masami Ikeda, Yoichiro Takahashi, Hidehiro Watanabe

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557725

KEYWORDS: Inspection, Sensors, Photomasks, Image sensors, Reticles, Light sources, Point spread functions, Image processing, Computer aided design, Phase shifting

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