Mr. Hisashi Matsumoto Profile

Hisashi Matsumoto

Senior Research Technologist at MKS Instruments Inc

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Author

Publications (6)

Proceedings Article | 12 March 2024 Presentation + Paper

Rapid and high throughput formation of through glass vias

Joel Schrauben, Hisashi Matsumoto, Zhibin Lin, Jan Kleinert

Proceedings Volume 12872, 1287205 (2024) https://doi.org/10.1117/12.2685276

KEYWORDS: Glasses, Laser drilling, Annealing, Simulations, Laser processing, Absorption

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Proceedings Article | 17 March 2023 Presentation + Paper

Analysis and mitigation of stress induced by rapid formation of through glass vias in thin substrates

Hisashi Matsumoto, Zhibin Lin, Joel Schrauben, Jan Kleinert

Proceedings Volume 12408, 1240809 (2023) https://doi.org/10.1117/12.2648524

KEYWORDS: Glasses, Annealing, Laser processing, Laser drilling, Simulations

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Proceedings Article | 16 February 2018 Paper

Ultrafast laser ablation of copper with ~GHz bursts

Hisashi Matsumoto, Zhibin Lin, Jan Kleinert

Proceedings Volume 10519, 1051902 (2018) https://doi.org/10.1117/12.2294041

KEYWORDS: Copper, Laser ablation, Optical simulations, Ultrafast lasers, Ultrafast phenomena, Picosecond phenomena, Monte Carlo methods, Laser processing

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Proceedings Article | 19 February 2003 Paper

Precision microfabrication with Q-switched CO2 lasers

Corey Dunsky, Hisashi Matsumoto

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486600

KEYWORDS: Carbon dioxide lasers, Laser drilling, Q switched lasers, Epoxies, Laser applications, Pulsed laser operation, Microfabrication, Ultraviolet radiation, Micromachining, Laser development

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Proceedings Article | 12 September 2002 Paper

Microvia formation with lasers

Yunlong Sun, Corey Dunsky, Hisashi Matsumoto, Glenn Simenson

Proceedings Volume 4915, (2002) https://doi.org/10.1117/12.482893

KEYWORDS: Laser drilling, Gas lasers, Carbon monoxide, Copper, Ultraviolet radiation, Q switched lasers, Beam shaping, Epoxies, Laser applications, Pulsed laser operation

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Proceedings Article | 25 February 2002 Paper

High-speed microvia formation with UV solid state lasers

Corey Dunsky, Hisashi Matsumoto, Glenn Simenson

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456885

KEYWORDS: Laser drilling, Ultraviolet radiation, Copper, Beam shaping, Solid state lasers, Carbon dioxide lasers, Laser applications, Packaging, Metals, Dielectrics

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Showing 5 of 6 publications

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