Prof. Ho-Seob Kim
at Sun Moon Univ
SPIE Involvement:
Publications (7)

Proceedings Article | 7 December 2013 Paper
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Electron beams, Electrodes, Silicon, Control systems, Lens design, Holmium, Analytical research, Structural design, Laser beam diagnostics, Communication engineering

Proceedings Article | 9 February 2007 Paper
Proc. SPIE. 6476, Optoelectronic Integrated Circuits IX
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Polymethylmethacrylate, Etching, Silicon, Monte Carlo methods, Wet etching, Photoresist processing, Nanolithography

Proceedings Article | 27 August 2005 Paper
Proc. SPIE. 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II
KEYWORDS: Gold, Photonic devices, Waveguides, Metals, Photonic crystals, Near field scanning optical microscopy, Very large scale integration, Optical printed circuit boards, Optical arrays, Nanowires

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Electron beams, Electrodes, Silicon, Particle filters, Optical alignment, Laser beam diagnostics, Semiconducting wafers

Proceedings Article | 28 August 2003 Paper
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Lithography, Etching, Dry etching, Neural networks, Photomasks, Optical proximity correction, Critical dimension metrology, Photoresist processing, Liquids, Neurons

Showing 5 of 7 publications
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