Dr. Hock-Chun Chin Profile

Dr. Hock-Chun Chin

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Publications (2)

Proceedings Article | 13 May 2013 Paper

Metrology solutions using optical scatterometry for advanced CMOS: III-V and Germanium multi-gate field-effect transistors

Hock-Chun Chin, Bin Liu, Xingui Zhang, Moh-Lung Ling, Chan-Hoe Yip, Yongdong Liu, Jiangtao Hu, Yee-Chia Yeo

Proceedings Volume 8788, 87881R (2013) https://doi.org/10.1117/12.2020248

KEYWORDS: Scatterometry, Metrology, Germanium, Transistors, Molybdenum, Process control, Indium gallium arsenide, Spectroscopy, Scanning electron microscopy

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Proceedings Article | 10 April 2013 Paper

Metrology solutions for high performance germanium multi-gate field-effect transistors using optical scatterometry

Hock-Chun Chin, Moh-Lung Ling, Bin Liu, Xingui Zhang, Jie Li, Yongdong Liu, Jiangtao Hu, Yee-Chia Yeo

Proceedings Volume 8681, 86813D (2013) https://doi.org/10.1117/12.2013413

KEYWORDS: Germanium, Scatterometry, Transmission electron microscopy, Scanning electron microscopy, Transistors, Metrology, Etching, Front end of line, 3D modeling

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