Dr. Holger Kierey Profile

Dr. Holger Kierey

at Carl Zeiss SMT GmbH

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Author

Publications (3)

Proceedings Article | 11 October 2004 Paper

High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy

Michael Kowalski, Raymond Cruddace, Troy Barbee, William Hunter, Klaus Heidemann, Bruno Nelles, Ralf Lenke, Holger Kierey

Proceedings Volume 5488, (2004) https://doi.org/10.1117/12.551304

KEYWORDS: Multilayers, Reflectivity, Coating, Polymers, Extreme ultraviolet, Holography, Diffraction gratings, Monochromators, Sensors, Optical design

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Proceedings Article | 29 January 2004 Paper

Fabrication of segmented Wolter type-1 mandrels for the Constellation-X mirror development program

Wilhelm Egle, Wolfgang Hafner, Axel Matthes, Georg Willma, Alexander Ilg, Heinz Schiehle

Proceedings Volume 5168, (2004) https://doi.org/10.1117/12.507733

KEYWORDS: Mirrors, Metrology, Polishing, Surface finishing, Zerodur, Reflectors, Active optics, Geometrical optics, Prototyping, X-rays

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Proceedings Article | 13 January 2004 Paper

EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing

Holger Kierey, Klaus Heidemann, Bernd Kleemann, Renate Winters, Wilhelm Egle, Wolfgang Singer, Frank Melzer, Rutger Wevers, Martin Antoni

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.507741

KEYWORDS: Diffraction gratings, Extreme ultraviolet, Reflectivity, Diffraction, Coating, Optical filters, Optical design, Optical fabrication, Image segmentation, Holography

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