Mr. Hsin Chang Profile

Hsin Chang

Graduate Student at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (2)

Proceedings Article | 26 March 2007 Paper

Immersion defect reduction, part II: the formation mechanism and reduction of patterned defects

Lin-Hung Shiu, Fu-Jye Liang, Hsing Chang, Chun-Kuang Chen, Li-Jui Chen, Tsai-Sheng Gau, Burn Lin

Proceedings Volume 6520, 652012 (2007) https://doi.org/10.1117/12.712527

KEYWORDS: Particles, Semiconducting wafers, Scanning electron microscopy, Digital watermarking, Printing, Defect inspection, Polymers, Immersion lithography, Neodymium, Wafer-level optics

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Proceedings Article | 24 March 2006 Paper

Characterization of critical dimension uniformity through in-situ detection of aerial images in a scanner

Stefan Hunsche, Michael Gassner, Yu Cao, Hsin Chang, Jeng-Horng Chen

Proceedings Volume 6152, 61521Z (2006) https://doi.org/10.1117/12.657343

KEYWORDS: Sensors, Semiconducting wafers, Critical dimension metrology, Scanners, Data modeling, Reticles, Image processing, Image sensors, Data acquisition, Calibration

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