Ms. Hua-Chen Hsu Profile

Hua-Chen Hsu

Associate Engineer at Industrial Technology Research Institute

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Publications (1)

Proceedings Article | 2 August 2004 Paper

A white-light profiling algorithm adopting the multiwavelength interferometric technique

Hua-Chen Hsu, Chi-Hong Tung, Ching-Fen Kao, Calvin Chang

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.559251

KEYWORDS: Beam splitters, Interferometry, Light sources, Profiling, Phase interferometry, Interferometers, Phase shifts, Objectives, Actuators, Algorithm development

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