Dr. Hua Chen Profile

Dr. Hua Chen

at Schlumberger-Doll Research Ctr

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Publications (1)

Proceedings Article | 13 February 2008 Paper

Highly integrated microfluidic sensors

Dan Angelescu, Hua Chen, Jacques Jundt, Helene Berthet, Bruno Mercier, Frederic Marty

Proceedings Volume 6886, 688607 (2008) https://doi.org/10.1117/12.764028

KEYWORDS: Microfluidics, Sensors, Capillaries, Semiconducting wafers, Fabrication, Microelectromechanical systems, Silicon, Microfabrication, Transducers, Temperature metrology

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