Mr. Huaping Wang Profile

Huaping Wang

Sr. Engineering Manager at Entegris Inc

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Author

Publications (3)

Proceedings Article | 12 December 2023 Presentation + Paper

EUV pod introduction

Huaping Wang, Russ Raschke, Phil Glynn

Proceedings Volume PC12751, PC127510J (2023) https://doi.org/10.1117/12.2678328

KEYWORDS: Extreme ultraviolet, Reticles, Pellicles, Particles, Design, Extreme ultraviolet lithography, Automation, Particle contamination, Scanners

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Proceedings Article | 18 March 2016 Paper

An update on pellicle-compatible EUV inner pod development

Huaping Wang, Russ Rashke, Chris Newman, Andrew Harris

Proceedings Volume 9776, 97762Q (2016) https://doi.org/10.1117/12.2219883

KEYWORDS: Pellicles, Extreme ultraviolet, Reticles, Sensors, Extreme ultraviolet lithography, Scanners, Particles, Manufacturing, Lithography, Reflectivity

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Proceedings Article | 5 April 2007 Paper

Purge micro-environment with ionized air to reduce chances of ESD damages to wafers

Huaping Wang, Yingkai Liu, Mike Cisewski

Proceedings Volume 6518, 65183Y (2007) https://doi.org/10.1117/12.708055

KEYWORDS: Semiconducting wafers, Nitrogen, Ionization, Wafer testing, Reticles, Ions, Power supplies, Manufacturing, Roads, Photomasks

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