Hubert Grange
Engineer at CEA-LETI
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Actuators, Mirrors, Optical lithography, Etching, Electrodes, Dielectrics, Silicon, Wavefronts, Deformable mirrors, Semiconducting wafers

Proceedings Article | 10 March 1999 Paper
Proc. SPIE. 3680, Design, Test, and Microfabrication of MEMS and MOEMS
KEYWORDS: Packaging, Sensors, Etching, Quartz, Electrodes, Silicon, Capacitance, Photomasks, Semiconducting wafers, Temperature metrology

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