Hui Wang
at Louisiana Tech Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Oxides, Lithography, Etching, Interfaces, Silicon, Oxygen, Deep reactive ion etching, Semiconducting wafers, Oxidation, Nanowires

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Lithium, Molecular bridges, Silica, Sensors, Etching, Nickel, Silicon, Bridges, Plasma etching, Semiconducting wafers

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