1-D photonic crystals with defects such as (L1H1)mLCH2(L2H2)n are investigated. The bandgap edge transmission peak is narrowed when the couple layer LC and the cover layer H2(L2H2)n are added to the photonic crystal (L1H1)m. Three different structures are studied. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structures B and C provide good optical tuning methods: large dynamic range (>150 nm), narrow bandwidth [full-width at half maximum (FWHM) is about 2 nm], and good tuning linearity. These structures can be easily fabricated by the surface micromachined technique.
Polyimide has been an important sacrificial layer material in the MEMS switch. Polyimide can be spun and photographied on silicon substrate. NaOH liquid can etch and develop polyimide. Then it needs to cure. After MEMS switch are manufactured, polyimide must be removed. The different cure temperature and time impacts the character of polyimide. The experiment result shows that it is easy to remove and can be lithographed. So it is suitable for microwave device. In this paper, refers that polyimide can be etched by NaOH, O2 and CF4.
Photonic crystal with defects such as (L1H1)m LCH2(L2H2)n is investigated in this paper. The band gap edge transmission peak is narrowed when the couple-layer LC and the cover layer H2(L2H2)n are added to the photonic crystal (L1H1)m.
Two different structures were studied in thip paper. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structure B provides a good optical tuning method: large dynamic range (>150 nm), narrow bandwidth (FWHM is about 2 nm) and good tuning linearity. This kind of structure can be fabricated by the surface micromachined technique easily.
In this paper we demonstrated a micromechanical optical modulator fabricated by surface micromechanical techniques. This modulator is optimized for a wavelength of 1.3 micrometers and intended for a fiber-to-the-home system. The modulation voltage is between 10 - 30 V, and at this modulation voltage modulator can work stably for long time in a wide frequency range.