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Dr. Huina Huina Xu
Sr. Application Development Engineer
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Publications (1)
Proceedings Article | 19 March 2015 Paper
Real time decision based multiple mode SEM review imaging solution
Huina Xu, Harsh Sinha, Garry Chen, White Pai, Jung Yan Yang, Charles Tsai
Proceedings Volume 9424, 94242G (2015) https://doi.org/10.1117/12.2086505
KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Optical inspection, Nondestructive evaluation, Inspection, Real time imaging, Wafer-level optics, Electron microscopes, Optics manufacturing, Oxides
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