Dr. Humberto Bocanegra Evans Profile

Dr. Humberto Bocanegra Evans

at Canon Nanotechnologies Inc

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 10 April 2024 Presentation + Paper

NIL solutions using computational lithography for semiconductor device manufacturing

Sentaro Aihara, Kenji Yamamoto, Yukio Nakano, Hiromu Kijima, Satoru Jimbo, Humberto Evans, Shingo Ishida, Masayoshi Fujimoto, Shota Takami, Yuichiro Oguchi, Junichi Seki, Toshiya Asano, Osamu Morimoto

Proceedings Volume 12954, 129540Z (2024) https://doi.org/10.1117/12.3009839

KEYWORDS: Nanoimprint lithography, Artificial intelligence, Lithography, Metrology, Computer simulations

Read Abstract +

Computational technologies are still in the course of development for nanoimprint lithography (NIL). Only a few simulators are applicable to the nanoimprint process, and these simulators are desired by device manufacturers as part of their daily toolbox. The most challenging issue in NIL process simulation is the scale difference of each component of the system. The template pattern depth and the residual resist film thickness are generally of the order of a few tens of nanometers, while the process needs to work over the entire shot size, which is typically of the order of 10 mm square. This amounts to a scale difference of the order of 106 . Therefore, in order to calculate the nanoimprint process with conventional fluid structure interaction (FSI) simulators, an enormous number of meshes is required, which results in computation times that are unacceptable. To support all lithographic systems, Canon has introduced “Lithography Plus”, a software solution capable of anomaly detection, automatic recovery, trouble flow prediction and remote support. The software is now under development specifically for NIL. Because NIL is a rheological process, to software must address a completely new work flow. In this paper, we introduce the methods used to create drop patterns and refinements to the NIL process simulator which can be applied to predict resist filling and, in the future, be used to make corrections to the drop pattern virtually, thereby eliminating time consuming on-tool verification. Finally, we discuss the development of virtual metrology software that incorporates artificial intelligence to provide fast feedback on key tool outputs such as overlay.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years