Mr. Hung-Chun Chen Profile

Hung-Chun Chen

at Industrial Technology Research Institue

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Publications (2)

Proceedings Article | 25 August 2008 Paper

Polymer inverters design flow and process fabricated on plastic substrate

Hung-Chun Chen, Wen-Gain Houng, Ming-Jiue Yu, Chi-Jen Kao, Chen-Pang Kung, Yung-Hui Yeh

Proceedings Volume 7054, 70540T (2008) https://doi.org/10.1117/12.794573

KEYWORDS: Transistors, Oscillators, Printing, Inkjet technology, Electrodes, Photoresist materials, Polymers, Flexible circuits, Semiconductors, Photomasks

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Proceedings Article | 24 August 2001 Paper

Novel negative photoresist process for 0.18 um dual damascene

Lin-Hung Shiu, Chih-Ming Lai, Fu-Jye Liang, Hung-Chun Chen, Li-Jui Chen, Shuo-Yen Chou

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436891

KEYWORDS: Photoresist processing, Scanning electron microscopy, Etching, Copper, Resolution enhancement technologies, Bottom antireflective coatings, Photomasks, Photoresist materials, Phase shifts, Aluminum

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