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Hyejin Kim
at ETRI
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Publications (2)
Proceedings Article | 19 October 2006 Paper
High-sensitive MEMS acoustic sensor using PMN-PT single-crystal diaphragm
Sung Lee, Hae Jin Kim, Kang Ho Park, Yong Hong, Kee Moon
Proceedings Volume 6374, 637409 (2006) https://doi.org/10.1117/12.686007
KEYWORDS: Electrodes, Crystals, Microelectromechanical systems, Etching, Acoustics, Sensors, Chlorine, Silicon, Plasma etching, Prototyping
Proceedings Article | 19 October 2006 Paper
A novel capacitive type miniature microphone with a flexure hinge diaphragm
Hye Jin Kim, Sung Lee, Kang Ho Park
Proceedings Volume 6374, 63740H (2006) https://doi.org/10.1117/12.686008
KEYWORDS: Silicon, Acoustics, Aluminum, Finite element methods, Oxides, Scanning electron microscopy, Sensors, Microelectromechanical systems, Semiconducting wafers, Etching
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