Hyejin Kim
at ETRI
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 October 2006 Paper
Proc. SPIE. 6374, Optomechatronic Actuators, Manipulation, and Systems Control
KEYWORDS: Microelectromechanical systems, Oxides, Sensors, Etching, Silicon, Scanning electron microscopy, Finite element methods, Aluminum, Acoustics, Semiconducting wafers

Proceedings Article | 19 October 2006 Paper
Proc. SPIE. 6374, Optomechatronic Actuators, Manipulation, and Systems Control
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Electrodes, Crystals, Silicon, Plasma etching, Chlorine, Acoustics, Prototyping

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