Dr. Hyesook Hong Profile

Dr. Hyesook Hong

Sr. Lithography Engineer

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Publications (3)

Proceedings Article | 6 December 2004 Paper

Design, mask, and manufacturability

Mark Ma, Hyesook Hong, Yong Seok Choi, Chi-Chien Ho, Mark Mason, Randy McKee

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.569309

KEYWORDS: Photomasks, Manufacturing, Optical proximity correction, Resolution enhancement technologies, Semiconducting wafers, Reticles, Silicon, Design for manufacturing, Scanning electron microscopy, Metals

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Proceedings Article | 1 August 2002 Paper

CD variations from nontrivial mask-related factors

Z. Mark Ma, Won Kim, Benjamen Rathsack, Guoqiang Xing, Mark Somervell, Hyesook Hong

Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476928

KEYWORDS: Photomasks, Critical dimension metrology, Pellicles, Semiconducting wafers, Reticles, Calibration, Etching, Photoresist processing, Process control, Metrology

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Proceedings Article | 12 July 2002 Paper

248-nm photolithography compatibility on low-k dielectrics in BEOL interconnects

Hyesook Hong, Guoqiang Xing, Andrew Mckerrow, Tae Kim, Patricia Smith

Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475693

KEYWORDS: Critical dimension metrology, Plasma, Dielectrics, Optical lithography, Photoresist materials, Nitrogen, Semiconducting wafers, Cadmium, Scanning electron microscopy, Etching

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