Ms. Hyo Gyeong Shin Profile

Hyo Gyeong Shin

at Hanyang Univ

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Publications (1)

Proceedings Article | 26 September 2019 Presentation + Paper

Extreme-ultraviolet pellicle durability comparison for better lifetime

Hyo-Gyeong Shin, Hye-Keun Oh

Proceedings Volume 11147, 111470U (2019) https://doi.org/10.1117/12.2536992

KEYWORDS: Pellicles, Extreme ultraviolet, Ruthenium, Particles, Extreme ultraviolet lithography, Lithography, Optical lithography, High volume manufacturing, Silicon carbide, Graphene

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