Hyun Jin In
Graduate Research Assistant at Massachusetts Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 May 2005 Paper
Hyun In, William Arora, Paul Stellman, Sundeep Kumar, Shao-Horn Yang, Henry Smith, George Barbastathis
Proceedings Volume 5763, (2005) https://doi.org/10.1117/12.600304
KEYWORDS: Nanolithography, Silicon, Nanostructuring, Etching, Chromium, Optical alignment, Silica, Metals, Fabrication, Semiconducting wafers

Proceedings Article | 18 October 2004 Paper
Proceedings Volume 5554, (2004) https://doi.org/10.1117/12.562581
KEYWORDS: Nanolithography, Nanostructuring, Silicon, Zone plates, Kinematics, Diffraction, Manufacturing, 3D modeling, Electron beam lithography, Gold

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