Hyun Jin Kim
Manager at Dongjin Semichem Co Ltd
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 16 April 2011 Paper
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Etching, Polymers, Reflectivity, Photoresist materials, Double patterning technology, Critical dimension metrology, Photoresist developing, Temperature metrology, Bottom antireflective coatings

Proceedings Article | 26 March 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Semiconductors, Lithography, Refractive index, Etching, Polymers, Materials processing, Reflectivity, Photoresist materials, Photoresist processing, Photorefractive polymers

Proceedings Article | 23 March 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Polymers, Image processing, Molecules, Diffusion, Reflectivity, Image resolution, Extreme ultraviolet lithography, Line edge roughness, Photoresist processing

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Etching, Polymers, Silicon, Diffusion, Coating, Line edge roughness, Photoresist processing, Semiconducting wafers, Chemically amplified resists

Proceedings Article | 24 July 2002 Paper
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Lithography, Polymers, Annealing, Molecules, Interfaces, Hydrogen, Diffusion, Carbonates, Line edge roughness, Chemically amplified resists

Showing 5 of 7 publications
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