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Dr. Hyun-Mi Kim
at Seoul National Univ
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Publications (1)
Proceedings Article | 26 January 2009 Paper
Electron beam projection nanopatterning using crystal lattice images obtained from high resolution transmission electron microscopy
Hyo-Sung Lee, Byung-Sung Kim, Hyun-Mi Kim, Jung-Sub Wi, Sung-Wook Nam, Kyung-Bae Jin, Ki-Bum Kim, Yoshihiro Arai
Proceedings Volume 7222, 72221B (2009) https://doi.org/10.1117/12.815252
KEYWORDS: Photomasks, Silicon, Crystals, Image resolution, Transmission electron microscopy, Electron beam lithography, Nanostructures, Objectives, Denoising, Lithography
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