Dr. Hyunwoo Hwang
Senior Engineer at SAMSUNG ELECTRONICS CO.,LTD
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Reticles, Calibration, Scanners, Control systems, Distortion, Thermal effects, Optical alignment, Semiconducting wafers, HVAC controls, Overlay metrology, Temperature metrology

Proceedings Article | 24 March 2017 Presentation + Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Metrology, Sensors, Calibration, Scanners, Computer programming, Time metrology, Optical alignment, Semiconducting wafers, Wafer testing, Overlay metrology

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Near infrared, Optical lithography, Opacity, Sensors, Image processing, Materials processing, Signal processing, Optical alignment, Optics manufacturing, Wafer testing, Overlay metrology

Proceedings Article | 26 March 2015 Paper
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Reticles, Electronics, Logic, Optical lithography, Statistical analysis, Control systems, Process control, Optical alignment, Semiconducting wafers, Overlay metrology

Proceedings Article | 6 April 2009 Paper
Proc. SPIE. 7287, Electroactive Polymer Actuators and Devices (EAPAD) 2009
KEYWORDS: Actuators, Optical lithography, Polymers, Composites, Resistance, Platinum, Capacitance, Plasma etching, Process modeling, Plasma

Showing 5 of 8 publications
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