Mr. Hüseyin Serbes Profile

Hüseyin Serbes

at University of Kassel

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Publications (1)

Proceedings Article | 20 May 2022 Presentation + Paper

Mirau-type coherence scanning interferometer with integrated vibration compensation

Hüseyin Serbes, Sebastian Hagemeier, Peter Lehmann

Proceedings Volume 12137, 1213707 (2022) https://doi.org/10.1117/12.2624021

KEYWORDS: Mirrors, Environmental sensing, Sensors, Interferometers, Signal processing, Light emitting diodes, Interferometry, Cameras, Coherence imaging, Vibration isolation, Distance measurement, Vibrational characterization, 3D surface sensing

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