Mr. Inpyo Kim Profile

Inpyo Kim

at SK Hynix Inc

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Publications (2)

Proceedings Article | 12 October 2021 Presentation + Paper

Sensitivity analysis based SEM measurement down-sampling approach for mask process modeling applications

Kushlendra Mishra, Rachit Sharma, Ingo Bork, Peter Buck, Dongeun Cha, Seungheon Na, Jaekwang Kim, Kiwook Park, Inpyo Kim

Proceedings Volume 11855, 118550Z (2021) https://doi.org/10.1117/12.2600926

KEYWORDS: Data modeling, Calibration, Photomasks, Process modeling, Statistical modeling, Scanning electron microscopy, Metrology, Critical dimension metrology, Error analysis

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Proceedings Article | 8 June 2010 Paper

Photomask defect detection and inspection: aerial imaging and high resolution inspection strategies

Sunghyun Oh, DaeHo Hwang, Inpyo Kim, Changreol Kim, Aviram Tam, Michael Ben Yishai, Yulian Wolff

Proceedings Volume 7748, 774827 (2010) https://doi.org/10.1117/12.869574

KEYWORDS: Inspection, Photomasks, SRAF, Defect detection, Image resolution, Critical dimension metrology, Airborne remote sensing, Artificial intelligence, Optics manufacturing, Signal detection

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