Inpyo Kim
at SK Hynix Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 June 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Defect detection, Inspection, Image resolution, Photomasks, Artificial intelligence, SRAF, Critical dimension metrology, Signal detection, Optics manufacturing, Airborne remote sensing

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