Mr. Ido Ashuah Profile

Ido Ashuah

at KLA Israel

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Small pitch overlay imaging metrology targets for tight OPO control

Nikhil Aditya Kumar Roy, Richard Housley, Suresh Kumar, Ranga Reddy, Dan Engelhard, Hao Wang, Atsushi Miyafuji, Toshiharu Nishiyama, Yoel Feler, Diana Shaphirov, Mark Ghinovker, Ido Ashuah, Yoav Grauer, Yonglei Li

Proceedings Volume 12955, 129551V (2024) https://doi.org/10.1117/12.3009769

KEYWORDS: Overlay metrology, Semiconducting wafers, Light sources and illumination, Metrology, Imaging metrology

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Proceedings Article | 27 April 2023 Poster + Paper

Small imaging overlay metrology targets for advance nodes

Yoel Feler, Diana Shaphirov, Mark Ghinovker, Katya Gordon, Ido Ashuah, Yunhua Wu, Penny Lin

Proceedings Volume 12496, 124962M (2023) https://doi.org/10.1117/12.2657850

KEYWORDS: Design and modelling, Light sources and illumination, Overlay metrology, Semiconducting wafers, Optical parametric oscillators, Scanners, Optical proximity correction, Metrology, Equipment, Wafer-level optics

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