Ms. Ileana Nedelcu Profile

Ileana Nedelcu

Student at FOM-Instituut voor Plasmafysica Rijnhuizen

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Publications (6)

Proceedings Article | 28 September 2011 Paper

Interface diffusion kinetics and lifetime scaling in multilayer Bragg optics

S. Bruijn, A. Yakshin, I. Nedelcu, F. Bijkerk, R. W. van de Kruijs

Proceedings Volume 8139, 81390A (2011) https://doi.org/10.1117/12.893546

KEYWORDS: Interfaces, Multilayers, Diffusion, Annealing, Reflectivity, Molybdenum, Silicon, Temperature metrology, Thermography, Extreme ultraviolet

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SPIE Journal Paper | 1 June 2008

Reflectivity and surface roughness of multilayer-coated substrate recovery layers for EUV lithographic optics

Ileana Nedelcu, Robbert van de Kruijs, Andrey Yakshin, Bernhard von Blanckenhagen, Fred Bijkerk

OE, Vol. 47, Issue 06, 063801, (June 2008) https://doi.org/10.1117/12.10.1117/1.2939403

KEYWORDS: Multilayers, Reflectivity, Surface roughness, Silicon, Atomic force microscopy, Optical coatings, Extreme ultraviolet, EUV optics, X-rays, Scattering

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Proceedings Article | 29 March 2007 Paper

Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition

E. Louis, R. van de Kruijs, F. Bijkerk, H. Enkisch, S. Müllender, A. Yakshin, I. Nedelcu, E. Zoethout

Proceedings Volume 6517, 65170I (2007) https://doi.org/10.1117/12.711796

KEYWORDS: Interfaces, Reflectivity, Particles, Multilayers, Sputter deposition, Silicon, Molybdenum, Diffusion, Deposition processes, Boron

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Proceedings Article | 21 March 2007 Paper

Substrate recovery layers for EUVL optics: effects on multilayer reflectivity and surface roughness

S. Mullender, E. Louis, A. Yakshin, R. van de Kruijs, I. Nedelcu, F. Bijkerk

Proceedings Volume 6517, 651730 (2007) https://doi.org/10.1117/12.712176

KEYWORDS: Multilayers, Reflectivity, Surface roughness, Silicon, Atomic force microscopy, Extreme ultraviolet lithography, Scattering, Zerodur, Semiconducting wafers, Silver

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Proceedings Article | 10 September 2005 Paper

Enhanced performance of EUV multilayer coatings

R. van de Kruijs, H. Enkisch, I. Nedelcu, S. van der Westen, T. Tsarfati, E. Louis, A. Yakshin, B. Mertens, S. Müllender, F. Bijkerk, B. Wolschrijn, E. Zoethout

Proceedings Volume 5900, 590002 (2005) https://doi.org/10.1117/12.616902

KEYWORDS: Optical coatings, Multilayers, Reflectivity, Extreme ultraviolet, Astronomy, Extreme ultraviolet lithography, Silver, Astronomical imaging, Molybdenum, Oxidation

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Proceedings Article | 6 May 2005 Paper

Multilayer coatings for the EUVL process development tool

F. Bijkerk, E. Louis, S. van der Westen, R. van de Kruijs, E. Zoethout, S. Muellender, A. Yakshin, I. Nedelcu, H. Enkisch, T. Tsarfati

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619856

KEYWORDS: Reflectivity, Optical coatings, Multilayers, Extreme ultraviolet lithography, Fiber optic illuminators, Projection systems, Mirrors, Optical components, Semiconducting wafers, Silver

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Showing 5 of 6 publications

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