Dr. Ingo Schmitz Profile

Dr. Ingo Schmitz

Sales Representative at Bruker Nano Inc

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Publications (2)

Proceedings Article | 17 October 2008 Paper

Improvement in metrology on new 3D-AFM platform

Ingo Schmitz, Marc Osborn, Sean Hand, Qi Chen

Proceedings Volume 7122, 71222X (2008) https://doi.org/10.1117/12.803581

KEYWORDS: Metrology, Photomasks, Critical dimension metrology, Line width roughness, Inspection, Calibration, Atomic force microscopy, Defect inspection, Silicon, Precision measurement

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Proceedings Article | 20 August 2004 Paper

OPC development: variable CD-SEM bias through feature shape, feature density, and material composition

Kirk Miller, Katsuhiro Matsuyama, Ingo Schmitz, Dean Dawson

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557810

KEYWORDS: Optical proximity correction, Etching, 3D metrology, Metrology, Atomic force microscopy, Photomasks, Logic, Critical dimension metrology, Scanning electron microscopy, Semiconducting wafers

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