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Irina Sagunova
at National Research Univ of Electronic Tech
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Publications (1)
Proceedings Article | 30 December 2016 Paper
Features of local anodic oxidation process
A. Belov, Yu. Chaplygin, S. Lemeshko, I. Sagunova, V. Shevyakov
Proceedings Volume 10224, 102241Q (2016) https://doi.org/10.1117/12.2264436
KEYWORDS: Oxidation, Photomasks, Oxides, Dielectrics, Conductive coatings, Modulation, Resistance, Silicon, Solid state electronics, Nanolithography
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