Dr. Ivan A. Shchelkanov Profile

Dr. Ivan A. Shchelkanov

at Univ of Illinois

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Publications (2)

SPIE Journal Paper | 9 February 2015

Magnetic debris mitigation system for extreme ultraviolet sources

Daniel Elg, John Sporre, Davide Curreli, Ivan Shchelkanov, David Ruzic, Karl Umstadter

JM3, Vol. 14, Issue 01, 013506, (February 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.1.013506

KEYWORDS: Ions, Extreme ultraviolet, Magnetism, Plasma, Extreme ultraviolet lithography, Argon, Electrons, Metrology, Computer simulations, Lithography

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Proceedings Article | 7 January 2015 Paper

Preparation of coatings with low roughness by high-current impulse magnetron discharge

Andrey Kaziev, Ivan Shchelkanov, Georgy Khodachenko

Proceedings Volume 9442, 94420J (2015) https://doi.org/10.1117/12.2086913

KEYWORDS: Nickel, Surface roughness, Sputter deposition, Aluminum, Silica, Plasma, Silicon, Ions, Power supplies, Polishing

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