Dr. J. Earl Rudisill Profile

Dr. J. Earl Rudisill

Consultant

SPIE Involvement:

Author

Publications (11)

SPIE Journal Paper | 10 July 2012

Absorption measurement of high-reflectance coated mirrors at 193 nm with a Shack-Hartmann wavefront sensor

Byungil Cho, Edward Danielewicz, J. Earl Rudisill

OE, Vol. 51, Issue 12, 121803, (July 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.12.121803

KEYWORDS: Mirrors, Absorption, Silica, Wavefront distortions, Wavefront sensors, Thin film coatings, Excimer lasers, Distortion, Adaptive optics, Optical testing

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SPIE Journal Paper | 10 July 2012

193-nm-laser-induced spectral shift in HR coated mirrors

Byungil Cho, J. Earl Rudisill, Edward Danielewicz

OE, Vol. 51, Issue 12, 121804, (July 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.12.121804

KEYWORDS: Coating, Reflectivity, Mirrors, Crystals, Diffusion, X-ray diffraction, Aluminum, Oxides, Refractive index, Dielectrics

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Proceedings Article | 28 November 2011 Paper

Absorption measurement of HR coated mirrors at 193nm with a Shack-Hartmann wavefront sensor

Byungil Cho, Edward Danielewicz, J. Earl Rudisill

Proceedings Volume 8190, 81901P (2011) https://doi.org/10.1117/12.898943

KEYWORDS: Mirrors, Absorption, Silica, Wavefront distortions, Wavefront sensors, Adaptive optics, Excimer lasers, Distortion, Thin film coatings, Deep ultraviolet

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Proceedings Article | 1 December 2010 Paper

Laser induced damage threshold of 266 AR coatings with different coating designs

Byungil Cho, Edward Danielewicz, J. Earl Rudisill

Proceedings Volume 7842, 78420B (2010) https://doi.org/10.1117/12.867105

KEYWORDS: Coating, Antireflective coatings, Silica, Laser induced damage, Reflectivity, Laser damage threshold, Interfaces, Temperature metrology, Absorption, Laser irradiation

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Proceedings Article | 31 December 2009 Paper

193 nm laser induced spectral shift in HR coated mirrors

Byungil Cho, J. Earl Rudisill, Edward Danielewicz

Proceedings Volume 7504, 750409 (2009) https://doi.org/10.1117/12.836262

KEYWORDS: Coating, Reflectivity, Mirrors, Crystals, Diffusion, Oxides, X-ray diffraction, Dielectrics, Interferometers, Refractive index

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Proceedings Article | 21 February 2005 Paper

Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application

J. Earl Rudisill, Angela Dupparre, Sven Schroeder

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.584743

KEYWORDS: Coating, Scattering, Reflectivity, Laser scattering, Oxides, Silica, Deep ultraviolet, Mirrors, Atomic force microscopy, Excimer lasers

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Proceedings Article | 10 June 2004 Paper

Design/deposition process tradeoffs for high performance optical coatings in the DUV spectral region

J. Earl Rudisill

Proceedings Volume 5273, (2004) https://doi.org/10.1117/12.524042

KEYWORDS: Coating, Deep ultraviolet, Reflectivity, Optical coatings, Optical lithography, Excimer lasers, Optical components, Antireflective coatings, Mirrors, Ions

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Proceedings Article | 28 July 1997 Paper

Deuterium-fluoride uncooled optics at HELSTF

Antonio Marrujo, Christopher Lieto, Patrick Pomphrey, J. Earl Rudisill

Proceedings Volume 10289, 102890N (1997) https://doi.org/10.1117/12.279814

KEYWORDS: Laser missile defense, Laser optics, Optical coatings, Active optics, Missiles, Defense and security, Laser development, Hydrogen fluoride lasers, Deuterium fluoride lasers, Laser applications

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