Junsu Jeon
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 April 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

Proceedings Article | 15 March 2012 Paper
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Lithography, Optical lithography, Silicon, Manufacturing, Data processing, Semiconducting wafers, Tolerancing, Failure analysis, Chemical mechanical planarization, Design for manufacturability

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