Prof. Jack K. Luo
at Univ of Bolton
SPIE Involvement:
Publications (12)

Proceedings Article | 9 August 2013 Paper
Proc. SPIE. 8793, Fourth International Conference on Smart Materials and Nanotechnology in Engineering
KEYWORDS: Thin films, Microfluidics, Resonators, Sensors, Sputter deposition, Crystals, Silicon, Lab on a chip, Zinc oxide, Acoustics

Proceedings Article | 25 April 2008 Paper
Proc. SPIE. 6993, MEMS, MOEMS, and Micromachining III
KEYWORDS: Microelectromechanical systems, Actuators, Transmitters, Modulation, Networks, Modulators, 3D modeling, Finite element methods, Optical networks, Optical modulators

Proceedings Article | 18 February 2008 Paper
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Microelectromechanical systems, Actuators, Metals, Nickel, Silicon, Resistance, Oxygen, Scanning electron microscopy, Microactuators, Oxidation

Proceedings Article | 15 May 2007 Paper
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Microelectromechanical systems, Thin films, Tissues, Etching, Silicon, Coating, Biopsy, Thermal effects, Image transmission, Shape memory alloys

Proceedings Article | 6 January 2006 Paper
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Thin films, Diamond, Etching, Nickel, Silicon, Silicon films, Profilometers, Low pressure chemical vapor deposition, Silicon carbide

Showing 5 of 12 publications
Proceedings Volume Editor (1)

Conference Committee Involvement (2)
Micro/Nanomanufacturing and Metrology
6 November 2011 | Beijing, Beijing, China
MEMS/MOEMS Technologies and Applications III
12 November 2007 | Beijing, China
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