Prof. Jae W. Hahn
Professor at Yonsei Univ
SPIE Involvement:
Publications (28)

Proceedings Article | 20 August 2020 Presentation
Proc. SPIE. 11484, Optical Modeling and Performance Predictions XI
KEYWORDS: Lithography, Electron beam lithography, Mirrors, Optical lithography, Photomasks, Digital micromirror devices, Zone plates, Semiconducting wafers

Proceedings Article | 19 August 2020 Presentation
Proc. SPIE. 11509, Optics and Photonics for Information Processing XIV
KEYWORDS: Lithography, Optical lithography, Lenses, Inspection, Optical testing, Photomasks, Charge-coupled devices, Beam shaping, Digital micromirror devices, Optical filtering

Proceedings Article | 4 March 2019 Presentation
Proc. SPIE. 10870, Design and Quality for Biomedical Technologies XII
KEYWORDS: Energy efficiency, Particles, X-rays, Scintillators, Diagnostics, Monte Carlo methods, Analytical research, Spatial resolution, X-ray imaging, Performance modeling

SPIE Journal Paper | 15 November 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Photomasks, Optical lithography, Source mask optimization, SRAF, Detection and tracking algorithms, Photovoltaics, Semiconducting wafers, Optical proximity correction, Computer simulations, Model-based design

Proceedings Article | 25 September 2017 Presentation
Proc. SPIE. 10393, Radiation Detectors in Medicine, Industry, and National Security XVIII
KEYWORDS: Fabrication, Energy efficiency, Visible radiation, Particles, X-rays, Scintillators, Manufacturing, Image resolution, Image quality, Absorption

Showing 5 of 28 publications
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