Dr. Jaehwan Kim
at Samsung Electronics
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Metals, Silicon, Manufacturing, Reliability, Design for manufacturing, Extreme ultraviolet lithography, Optical proximity correction, Semiconducting wafers, Yield improvement, Chemical mechanical planarization

Proceedings Article | 4 April 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

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