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Jagannathan Rajagopalan
at Univ of Illinois
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Author
Publications (1)
Proceedings Article | 12 February 2007 Paper
MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films
Proceedings Volume 6464, 64640C (2007) https://doi.org/10.1117/12.706115
KEYWORDS: Metals, Calibration, Silicon, Etching, Aluminum, Sensors, Transmission electron microscopy, Scanning electron microscopy, Photoresist materials, Semiconducting wafers
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