Dr. Jan-Uwe Schmidt
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Publications (17)

Proceedings Article | 28 February 2020 Paper
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Actuators, Mirrors, Optical lithography, Calibration, Micromirrors, CMOS technology, Analog electronics

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

Proceedings Article | 16 February 2012 Paper
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Mirrors, Continuous wave operation, Electrodes, Laser applications, Reflectivity, Modulators, Microopto electromechanical systems, Micromirrors, Surface properties, Printed circuit board testing

Proceedings Article | 14 May 2010 Paper
Proc. SPIE. 7718, Optical Micro- and Nanometrology III
KEYWORDS: Laser sources, Diffraction, Mirrors, Homogenization, Deep ultraviolet, Imaging systems, Cameras, Reflectivity, Micromirrors, Spherical lenses

Proceedings Article | 14 May 2010 Paper
Proc. SPIE. 7716, Micro-Optics 2010
KEYWORDS: Actuators, Near infrared, Electron beam lithography, Mirrors, Electronics, Deep ultraviolet, Metals, Reflectivity, Control systems, Micromirrors

Showing 5 of 17 publications
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