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Janghee Lee
at Seoul National Univ
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Publications (3)
SPIE Journal Paper | 10 October 2014
Exact and reliable overlay metrology in nanoscale semiconductor devices using an image processing method
Jinkook Park, ChaeHo Shin, Minkook Kim, Junghwan Kim, JeongKyun Park, JungSoo Kim, ChungSam Jun, Yeny Yim, Janghee Lee
JM3, Vol. 13, Issue 04, 041409, (October 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.4.041409
KEYWORDS: Overlay metrology, Image processing, Semiconductors, Semiconducting wafers, Detection and tracking algorithms, Algorithm development, Quantization, Reliability, Image segmentation, Scanning electron microscopy
SPIE Journal Paper | 14 September 2012
Defect detection on images using multiple reference images: solving a binary labeling problem using graph-cuts algorithm
JEI, Vol. 21, Issue 3, 033014, (September 2012) https://doi.org/10.1117/12.10.1117/1.JEI.21.3.033014
KEYWORDS: Defect detection, Binary data, Detection and tracking algorithms, Semiconducting wafers, Scanning electron microscopy, Image processing, Inspection, Optimization (mathematics), Image analysis, Expectation maximization algorithms
Proceedings Article | 6 May 2010 Paper
A hybrid energy model for extracting boundaries of multiple overlapped objects on images
Proceedings Volume 7723, 77231L (2010) https://doi.org/10.1117/12.854125
KEYWORDS: Image segmentation, Statistical modeling, Scanning electron microscopy, Semiconducting wafers, Feature extraction, Data modeling, Image processing, Computer science, Computer engineering, Image processing algorithms and systems
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