Mr. Janghwi Lee Profile

Janghwi Lee

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 3 October 2022 Poster + Paper

On-machine laser spot diagnostics by scanning linear image sensor for maskless lithography system

Akinori Ohkubo, Jiyoung Chu, Janghwi Lee, Sunghwi Cho, Wondon Joo, Sangwoo Bae

Proceedings Volume 12221, 122211B (2022) https://doi.org/10.1117/12.2631007

KEYWORDS: Diagnostics, Image sensors, Sensors, Geometrical optics, Digital micromirror devices, Calibration, CCD image sensors, Maskless lithography, Micromirrors, Wavefront aberrations

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Proceedings Article | 20 August 2020 Poster + Paper

Signal-to-noise ratio evaluation for the nanometer-scale patterned defect inspection using dark-field microscopy with tailored polarization illumination

Akinori Ohkubo, Janghwi Lee, Hyungu Kim, Jiyoung Chu, Sungho Jang, Sangwoo Bae, Wondon Joo

Proceedings Volume 11485, 114850N (2020) https://doi.org/10.1117/12.2567116

KEYWORDS: Signal to noise ratio, Polarization, Scattering, Near field, Cameras, Semiconducting wafers, Ellipsometry

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