Mr. Jarkko Tuominen Profile

Jarkko Tuominen

at VTT Technical Research Ctr of Finland Ltd

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Publications (5)

Proceedings Article | 15 May 2014 Paper

Toward large-area roll-to-roll printed nanophotonic sensors

Pentti Karioja, Jussi Hiltunen, Sanna Aikio, Teemu Alajoki, Jarkko Tuominen, Marianne Hiltunen, Samuli Siitonen, Ville Kontturi, Karl Böhlen, Rene Hauser, Martin Charlton, Arjen Boersma, Peter Lieberzeit, Thorsten Felder, David Eustace, Eliav Haskal

Proceedings Volume 9141, 91410D (2014) https://doi.org/10.1117/12.2052496

KEYWORDS: Sensors, Ultraviolet radiation, Photonic crystals, Polymers, Semiconducting wafers, Nanoimprint lithography, Manufacturing, Interferometers, Waveguides, Nanophotonics

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Polymers have become an important material group in fabricating discrete photonic components and integrated optical devices. This is due to their good properties: high optical transmittance, versatile processability at relative low temperatures and potential for low-cost production. Recently, nanoimprinting or nanoimprint lithography (NIL) has obtained a plenty of research interest. In NIL, a mould is pressed against a substrate coated with a moldable material. After deformation of the material, the mold is separated and a replica of the mold is formed. Compared with conventional lithographic methods, imprinting is simple to carry out, requires less-complicated equipment and can provide high-resolution with high throughput. Nanoimprint lithography has shown potential to become a method for low-cost and high-throughput fabrication of nanostructures. We show the development process of nano-structured, large-area multi-parameter sensors using Photonic Crystal (PC) and Surface Enhanced Raman Scattering (SERS) methodologies for environmental and pharmaceutical applications. We address these challenges by developing roll-to-roll (R2R) UV-nanoimprint fabrication methods. Our development steps are the following: Firstly, the proof of concept structures are fabricated by the use of wafer-level processes in Si-based materials. Secondly, the master molds of successful designs are fabricated, and they are used to transfer the nanophotonic structures into polymer materials using sheet-level UV-nanoimprinting. Thirdly, the sheet-level nanoimprinting processes are transferred to roll-to-roll fabrication. In order to enhance roll-to-roll manufacturing capabilities, silicone-based polymer material development was carried out. In the different development phases, Photonic Crystal and SERS sensor structures with increasing complexities were fabricated using polymer materials in order to enhance sheet-level and roll-to-roll manufacturing processes. In addition, chemical and molecular imprint (MIP) functionalization methods were applied in the sensor demonstrators. In this paper, the process flow in fabricating large-area nanophotonic structures by the use of sheet-level and roll-to-roll UV- nanoimprinting is reported.

Proceedings Article | 17 May 2012 Paper

Long single-mode waveguides made by imprint patterning for optical interconnects and sensors

Mikko Karppinen, Jussi Hiltunen, Anna Kokkonen, Jarno Petäjä, Noriyuki Masuda, Marianne Hiltunen, Jarkko Tuominen, Pentti Karioja

Proceedings Volume 8428, 842814 (2012) https://doi.org/10.1117/12.923621

KEYWORDS: Waveguides, Signal attenuation, Polymers, Manufacturing, Cladding, Optics manufacturing, Optical interconnects, Optical lithography, Sensors, Polymer multimode waveguides

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Proceedings Article | 3 May 2011 Paper

Polymer based single and multislot waveguides

M. Hiltunen, J. Hiltunen, Antti Suutala, Jarkko Tuominen, Pentti Karioja

Proceedings Volume 8068, 806812 (2011) https://doi.org/10.1117/12.886815

KEYWORDS: Waveguides, Polymers, Polymer multimode waveguides, Refractive index, Photorefractive polymers, Finite element methods, Coating, Cladding, Etching, Titanium dioxide

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Proceedings Article | 15 May 2008 Paper

Direct patterning of micro-optical structures by combined nanoimprinting and lithography

Jarkko Tuominen, Jussi Hiltunen, Antoine Wojdyla, Mikko Karppinen, Antti Suutala, Heli Jantunen, Renaud Bouffaron, Ludovic Escoubas

Proceedings Volume 6992, 69920B (2008) https://doi.org/10.1117/12.781151

KEYWORDS: Optical lithography, Photomasks, Waveguides, Nanoimprint lithography, Lithography, Silicon, Reactive ion etching, Nanolithography, Scanning electron microscopy, Holography

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Proceedings Article | 18 August 2004 Paper

Photo-crosslinkable hybrid material with improved aging stability for integrated optics

Maja Kusevic, Arto Maaninen, Jussi Hiltunen, Marianne Hiltunen, Jarkko Tuominen, Pentti Karioja

Proceedings Volume 5451, (2004) https://doi.org/10.1117/12.545488

KEYWORDS: Waveguides, Silicon, Signal attenuation, Refractive index, Integrated optics, Sol-gels, Interferometers, Zirconium dioxide, Materials processing, Optical components

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