Jarkko Tuominen
at VTT Technical Research Ctr of Finland Ltd
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 15 May 2014 Paper
Proc. SPIE. 9141, Optical Sensing and Detection III
KEYWORDS: Waveguides, Interferometers, Sensors, Polymers, Ultraviolet radiation, Manufacturing, Photonic crystals, Nanoimprint lithography, Nanophotonics, Semiconducting wafers

Proceedings Article | 17 May 2012 Paper
Proc. SPIE. 8428, Micro-Optics 2012
KEYWORDS: Optical lithography, Waveguides, Cladding, Sensors, Signal attenuation, Polymers, Manufacturing, Optical interconnects, Optics manufacturing, Polymer multimode waveguides

Proceedings Article | 3 May 2011 Paper
Proc. SPIE. 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V
KEYWORDS: Refractive index, Titanium dioxide, Waveguides, Cladding, Etching, Polymers, Coating, Finite element methods, Photorefractive polymers, Polymer multimode waveguides

Proceedings Article | 15 May 2008 Paper
Proc. SPIE. 6992, Micro-Optics 2008
KEYWORDS: Lithography, Holography, Optical lithography, Waveguides, Silicon, Scanning electron microscopy, Photomasks, Nanoimprint lithography, Reactive ion etching, Nanolithography

Proceedings Article | 18 August 2004 Paper
Proc. SPIE. 5451, Integrated Optics and Photonic Integrated Circuits
KEYWORDS: Optical components, Refractive index, Waveguides, Interferometers, Signal attenuation, Silicon, Materials processing, Integrated optics, Sol-gels, Zirconium dioxide

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