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Jason L. Dimkoff
R&D optical engineer
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Publications (1)
Proceedings Article | 1 July 2002 Paper
Power scale-up of the extreme-ultraviolet electric capillary discharge source
Neal Fornaciari, Howard Bender, Dean Buchenauer, Jason Dimkoff, Michael Kanouff, Steve Karim, Carmelo Romeo, Gregory Shimkaveg, William Silfvast, Kenneth Stewart
Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472282
KEYWORDS: Extreme ultraviolet, Capillaries, Curtains, Particles, Lamps, Aluminum nitride, Plasma, Diamond, Electrodes, Sensors
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