Mr. Jason Lee Profile

Jason Lee

Sr. Principal Engineer at Cymer LLC

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Publications (2)

Proceedings Article | 23 March 2011 Paper

Focus drilling for increased process latitude in high-NA immersion lithography

Ivan Lalovic, Tom van der Hoeff, Hans van der Laan, Carsten Kohler, Michiel Kupers, Nakgeuon Seong, Nigel Farrar, Jason Lee

Proceedings Volume 7973, 797328 (2011) https://doi.org/10.1117/12.882391

KEYWORDS: Laser drilling, Lithography, Metrology, Semiconducting wafers, Electroluminescence, Optical lithography, Immersion lithography, Critical dimension metrology, Photomasks, Chromatic aberrations

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Proceedings Article | 12 May 2005 Paper

65nm node gate pattern using attenuated phase shift mask with off-axis illumination and sub-resolution assist features

Gary Zhang, Mark Mason, Robert Soper, Steven Hansen, Jason Lee, Sean O'Brien, Joe Ganeshan, Won Kim, Mark Terry, Changan Wang

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600409

KEYWORDS: SRAF, Critical dimension metrology, Optical proximity correction, Photomasks, Scanners, Lithographic illumination, Semiconducting wafers, Phase shifts, Lithography, Resolution enhancement technologies

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