The SPRITE (The Supernova remnants, Proxies for Re-Ionization Testbed Experiment) 12U CubeSat mission, funded by NASA and led by the Laboratory for Atmospheric and Space Physics (LASP) at the University of Colorado Boulder, will house the first Far-UV (100-175 nm) long-slit spectrograph with access to the Lyman UV (λ ⪅ 115 nm) and sub-arcminute imaging resolution. SPRITE will map the high energy emission from diffuse gas allowing for the study of star formation feedback in a critical, but rarely studied, Far-UV regime on both stellar and galactic scales. This novel capability is enabled by new UV technologies incorporated into SPRITE’s design. These technologies include more robust, high broadband reflectivity mirror coatings and an ultra-low background photon counting microchannel plate detector. The SPRITE science mission includes weekly calibration observations to characterize the performance of these key UV technologies over time, increasing their technology readiness level (TRL) to 7+ and providing flight heritage essential for future UV flagship space missions such as the Habitable Worlds Observatory (HWO). Currently, SPRITE is in the beginning stages of integration and testing of its flight assembly with a planned delivery date of fall of 2024. This proceeding will overview the current mission status, the schedule for testing and integration prior to launch, and the planned mission operations for SPRITE.
Aluminum (Al) mirrors are conventionally protected with metal-fluoride coatings (e.g., MgF2, LiF, or AlF3) immediately after deposition to prevent oxidation and preserve its far-ultraviolet (FUV) spectral efficiency. However, the resulting FUV reflectance of the aluminum reflector is limited by the metal-fluoride overcoat film index of refraction, morphology, stoichiometry, and its absorption cut-off in the lower end of the FUV spectra. Cryolite (sodium hexafluoroaluminate, Na3AlF6) emerges as a potential candidate to preserve the aluminum FUV reflectance due to its relatively lower index of refraction in the visible to ultraviolet; therefore, allowing for the thin-film design of highly spectral efficient reflectors over a wide spectral range. We investigate the use of cryolite in aluminum reflector FUV coating design. The deposited aluminum reflector overcoated with cryolite will be examined in terms of spectral efficiency and environmental durability. The deposited cryolite overcoat will be evaluated in terms of optical constants and structural properties. Preliminary results have shown that the use of cryolite as an overcoat to protect aluminum would yield unprecedented results as an optimal Hydrogen Lyman-alpha (HLyα) spectral line reflector, with experimental reflectance values >96%.
Astronomical space telescopes to study astrophysical phenomena from the far ultraviolet (FUV) to the near infrared (NIR) will require mirror coatings with high reflectance over this entire spectral region. While coatings for the optical and NIR part of the spectrum are fairly well developed with proven performance, the FUV range has presented significant challenges, particularly below 120nm. Recent developments in electron-beam (e-Beam) generated plasma treatment in a SF6 environments has enabled the effective passivation of aluminum (Al) coatings for applications in the FUV, by native oxide removal and the formation of a AlF3 passivation layer which could be tuned to any desired AlF3 thickness. These results have been produced through a collaboration between the Goddard Space Flight Center (GSFC) and the Naval Research Laboratory (NRL). The passivation experiments have been carried out using the Large Area Plasma Processing System (LAPPS) at NRL using bare aluminum samples and provided by the coating group at GSFC. This novel procedure has demonstrated improved Al mirrors with state-of-the-art FUV reflectivity (e.g. R=91% at 121.6nm). In this paper, we will be reporting on environmental testing, micro-roughness, as well as polarization studies of these E-beam treated samples. These characterizations are being done in order to advance the Technology Readiness Level (TRL) for these Al+AlF3 mirror coatings produced at LAPPS. The ultimate goal is to demonstrate the promise of using this coating technology to deliver reflectance performance plus stability and uniformity over a large area for a future IR/O/UV space telescope observatory.
New mission concepts that are under consideration by NASA call for the design and implementation of Far Ultraviolet (FUV) polarizer technologies that have not been developed yet. A team that includes members from the NASA Goddard Space Flight Center (GSFC), Arizona State University (ASU), and Woodruff Consulting, worked on the design and development of a polarizer design that produce very high extinction ratios in the FUV spectral range (100-200 nm). This polarizer consists of reflecting light through a series of mirrors from a combination of two silicon carbide (SiC) and two lithium fluoride (LiF) crystals positioned at angles of incidence (relative to surface normal) close to the average LiF Brewster’s angle in the FUV. The output is a highly linearly polarized beam. This polarizer concept was fabricated and tested in the existing McPherson 225 Vacuum Ultraviolet (VUV) spectrometer located in the Optics Branch at NASAGSFC. Initial testing using a MgF2 crystal at the Brewster’s angle as an analyzer has shown that this design can produce state-of-the-art extinction ratios at the Hydrogen Lyman-Alpha (Ly-α) wavelength of 121.6 nm, and that the measured extinction ratio of the two crossed polarizers, ≈114, is mostly limited by the MgF2 analyzer. A polarizer with such a performance at this wavelength has never been reported and it signifies a breakthrough in FUV polarization technology. The levels of effectiveness paired with the polarizer’s compact design allows for a new polarizer capability that would one day be implemented in a future FUV spectropolarimetry space mission.
In previous work we demonstrated the feasibility of a new plasma process based on electron beam-generated plasmas in SF6 environments that effectively passivates the surface of aluminum mirror samples for applications in the UV/O/IR (ultraviolet/optical/infrared) by removing the native oxide layer and producing an AlF3 passivation layer with tunable thickness. This process provides good results in terms of far ultraviolet reflectivity, environmental stability, uniformity, polarization aberration, surface roughness, and does not require elevated substrate temperatures or ultra-high vacuum conditions. In this communication we show that, in addition to these characteristics, Al mirrors can be passivated faster with NF3 than with SF6 over a wide range of process parameters without the loss of optical performance independent of the working-gas choice adopted for the plasma.
Touch-probing with a Coordinate Measuring Machine (CMM) is not new but contact-measuring a sensitive optic for use in space flight or other vacuum applications is usually considered high risk and avoided at all costs due to specialty substrate materials, optical thin film coatings, and tight surface error tolerances needed for high performance systems operating at challenging wavelengths. In an environmentally controlled cleanroom with a CMM, we inspect the surface damage from touch-probing a variety of optics for use in space flight missions. Motivation comes from the requirement to both characterize an optic and its coordinate system for use in complex, opto-mechanical alignments with single-digit micron accuracies. Currently, a multi-step/instrument process is performed to prevent surface damage, relate the optic’s reference frame to metrology targets on a mount or other associated hardware, and then confidently track the optic’s orientation throughout integration and test. Disadvantages of this measurement combination include error stack-ups, hardware-handling safety, increased exposure to contamination, multiple instrument availability, personnel logistics, and extended schedules. We report on experiments with techniques to mitigate these risks, to create a catalog capturing the measurement parameters used on each space-qualified substrate and coating, and to show surface damage results on the order of single-digit nanometers after touch-probing. Until non-contact, continuous-measurement, multi-axis probes with high accuracy exist, this touch-probing technique shows promise for absolute metrology on sensitive, space flight optics by reducing the risks of conventional multi-step/instrument processes.
Efficient mirrors with high reflectivity over the ultra-violet, optical, and infra-red (UVOIR) spectral range are essential components in future space-based observatories. Aluminum mirrors with fluoride-based protective layers are commonly the baseline UV coating technology; these mirrors have been proven to be stable, reliable, and with long flight heritage. However, despite their optical performance to date, their reflectivity is still insufficient for future large telescope instrumentation in which several reflections are required.
Recently, a novel passivation procedure based on the exposure of bare Al to a fluorine containing electron beam generated plasma has been presented [1,2]. This research is framed in a collaboration between Goddard Space Flight Center (GSFC) and the U.S. Naval Research Laboratory (NRL), with plasma treatment carried out in NRL’s large area plasma processing system (LAPPS) using aluminum coated glass samples produced at GSFC coating facilities. The passivation of the bare Al is accomplished by using an electron-beam generated plasma produced in a fluorine-containing background to simultaneously remove the native oxide layer while promoting the formation of an AlF3 passivation layer with tunable thickness. Importantly, this new treatment uses benign precursors (SF6) and is performed at room temperature. In this work, details of the plasma process and in situ surface monitoring with spectroscopic ellipsometry are discussed. This novel procedure has demonstrated improved Al mirrors with state of the art far-ultraviolet (FUV) (λ = 90-200 nm) reflectivity (e.g. R=91% at 121.6 nm) paired with an excellent thickness control of the Al protective layer.
We present aluminum (Al) mirrors protected with a flash lithium fluoride (LiF) overcoat. Each of these Al and LiF layers are produced with a novel room-temperature reactive Physical Vapor Deposition (rPVD) process that consists of exposing these films growth to a fluorine-containing xenon di-fluoride (XeF2) gas. We report two sets of Al/LiF mirrors produced with this rPVD process. The first set is optimized at a wavelength of 121.6 nm and presents an unprecedented reflectance of 92.6% at this wavelength. The second set is optimized at shorter wavelengths by reducing the thickness of the LiF overcoat to have a more balance reflectance performance in the far-ultraviolet (FUV) spectral range from 90-200 nm. This new process is observed to produce more durable and less hygroscopic mirrors than those fabricated with standard PVD process, and has utility in realizing an intrinsic high reflectance of aluminum in the critical FUV spectral range.
The development of high reflectivity, protective mirror coatings for the Lyman UV (λ < 120 nm) is essential for enabling both CubeSats and large UVOIR missions to tap this rich bandpass. Aluminum mirrors with fluoride-based protective layers are the baseline UV coating technology; these mirrors have been proven to be stable, reliable, and with long flight heritage. However, despite their overall acceptable optical performance, the efficiency of current state-of-theart Al coatings is still insufficient in the 100-120 nm wavelength range for optical systems in which several reflections are required. Optimizing the efficiency down to 100 nm is essential for the viability and scientific return of the next generation of future FUV-sensitive space telescopes, as was called out in the 2020 astrophysics decadal survey. In this proceeding, we will present recent advances in the development of environmentally stable Al+eLiF+MgF2 mirrors deposited on substrates with increasing thicknesses, developed for the SPRITE CubeSat. SPRITE is projected to be the most sensitive instrument to date in the 100 - 120 nm range and the first orbital imaging spectrograph for this bandpass with sub-arcminute resolution.
Efficient ultraviolet (UV) mirrors are essential components in space observatories for UV astronomy. Aluminum mirrors with fluoride-based protective layers are commonly the baseline UV coating technology; these mirrors have been proven to be stable, reliable, and with long flight heritage. However, despite their acceptable optical performance, the single-bounce reflectance values are still too low for use in optical systems in which several reflections are required. Recently, a novel passivation procedure based on the self-fluorination of bare Al has been presented [1, 2]. This research is framed in a collaboration between the Goddard Space Flight Center (GSFC) and the Naval Research Laboratory (NRL), and the experiments are carried out in the Large Area Plasma Processing System (LAPPS) at NRL using bare aluminum samples coated at GSFC coating facilities. The passivation of the oxidized Al is accomplished by using an electron-beam generated plasma produced in a fluorine-containing background to simultaneously remove the native oxide layer while promoting the formation of an AlF3 passivation layer with tunable thickness. Importantly, this new treatment uses benign precursors (SF6) and does not require high substrate temperatures. This novel procedure has demonstrated improved Al mirrors with enhanced FUV reflectivity. Examples of mirrors tuned at several key FUV wavelengths are provided. The LAPPS has been recently upgraded to include a new spectroscopic ellipsometer for real-time, in situ measurements of film thickness and optical constants of the fluoride layer during the plasma treatment. Since this new capability requires precise knowledge of the complex refractive index (n,k) of AlF3, we present optical constants in the 90-2500 nm range obtained from Al mirrors previously prepared using the LAPPS process. The derived optical properties from the AlF3 passivation layer show similar optical properties in the FUV when compared with PVD- and ALD- hot-deposited AlF3.
Space telescopes for studying astrophysical phenomena from the far ultraviolet (FUV) to the near infrared (NIR) require durable mirror coatings with high and uniform reflectance over a very broad spectral region. While coatings for the optical and NIR region are well developed with proven performance, the FUV band presents significant challenges, particularly below 115 nm. Recent developments in physical vapor deposition (PVD) coating processes of aluminum mirrors that are protected with a metal-fluoride overcoat to prevent oxidation (such as LiF, MgF2, or AlF3) have improved reflectance in the FUV. While the emphasis in these studies has been placed on improving the deposition conditions of the metal-fluoride overcoats, less attention has been devoted to how deposition parameters (such as vacuum conditions or deposition rates) may affect the quality of the aluminum mirrors. This paper presents characterization of Al+MgF2 coupons made by ash evaporation of aluminum followed by resistive evaporation of MgF2. Samples were manufactured under a variety of processing conditions and the relationship between processing variables and mirror FUV re ectivity is analyzed. Performance characterization was based on the measured near-normal reflectance in the FUV (90-180 nm), and normal-incidence transmittance in the visible was done to analyze the possible presence of pinholes in the mirror. We demonstrated pinhole-free Al/MgF2 mirrors deposited at room temperature with a reflectivity of 0.91 at 122 nm wavelength. This reflectivity enhancement was achieved solely through parameter optimization.
Digital micromirror devices (DMDs) can be used as versatile, rapidly reconfigurable object selectors in spacebased multi-object spectrographs (MOS). DMDs are inexpensive, compact, reliable, high-throughput devices, that enable extremely flexible and efficient multi-object spectrographs; several DMD-based MOSs are currently being built for 4 m class ground-based telescopes. Previously, we have shown that DMDs are suitable for deployment and operation in space, in the near-UV and optical regimes (200 - 1000 nm). Using aluminum coatings protected with LiF and LiF/AlF3 films, we aim to extend the operational range of DMDs into the 100 - 200 nm FUV regime. Our initial coating runs produced DMDs with reflectivity > 40% in the range of 110 - 180 nm. Critically, the DMDs remain operational after the coating process. We will discuss potential for further improvement and introduce several mission concepts based on a FUV/NUV DMD MOS, that can be deployed on CubeSat and ESPA-class missions.
Recent development in coating deposition processes for aluminum (Al) mirrors that are protected with a metal-fluoride overcoat (such as LiF, MgF2, or AlF3) have improved reflectance performance particularly in the far- ultraviolet (FUV) part of the optical spectrum. The active research in this area is motivated by the fact that these gains in reflectance are expected to significantly increase the throughput of any future FUV sensitive NASA missions into the Lyman Ultraviolet. These reflectance improvements are attributed, in part, by performing the metal-fluoride overcoat depositions with the substrates at an elevated temperature as high as 250 °C. ZERODUR® is a widely used material as a mirror substrate because, among other things, it exhibits a low coefficient of thermal expansion (CTE) over a wide range of temperatures. Moreover, ZERODUR® has recently been proposed for several future NASA concept missions where this improved FUV mirror coating may be used. Given the elevated temperature at which these improved FUV coatings are produced, it is imperative to make sure that heating of the substrate will not significantly impact the final figure of the coated mirror. In this paper, we will study and report the effects of heating ZERODUR® up to the highest temperature mentioned above (250 °C) during a simulated coating process. These studies are relevant since it has been reported the CTE will change if ZERODUR® is cooled down from application temperatures between 130°C and 320°C with rates that differ from the initial production annealing rate of 3°C/hr.
This paper presents modeling results for coating thickness as a function of position, for aluminum films made with a hexagonal array of evaporation sources. The computer simulation is based on measured plume data from a single evaporation source. The model is used to determine optimum source spacing for a given plume shape. The analysis revealed that arrangement of multiple sources in a hexagonal array can produce uniform coatings while utilizing a reasonable number of evaporation sources per square meter of coating area. Monte Carlo simulations followed by gradient descent optimization methods were used to determine optimal flatness solutions for groups of deposition sources with varied deposition times. Thin aluminum films with exceptional coating flatness are needed to meet the wavefront error requirements of future space-based telescope concepts such as HabEx, LUVOIR, CETUS and others.
Digital micromirror devices (DMDs) can be used as rapidly reconfigurable "slit mask" object-selectors in space- based UV multi-object spectrometers (MOS). There are several missions currently in the planning process, which are developing concepts for multi-object spectrometers. For example, both LUVOIR and HabEx plan to include such an instrument, working into the deep UV. Currently, DMDs are the only alternative technology to microshutter arrays, which were developed for the infrared MOS on the James Webb Space Telescope. However, the deep UV (100 - 300 nm) reflectivity of DMDs needs to be substantially higher for efficient mission operation. We have re-coated commercially available DMDs (which use aluminum alloy mirrors) with high reflectivity aluminum, which is protected from oxidation by a AlF3 overcoat. We found that DMDs remain functional after being re-coated and show a dramatic reflectance improvement in the region of 100 - 300 nm. The scattering properties of re-coated DMDs can be further improved by masking the gaps between individual micromirrors during the coating process.
Astronomical space telescopes to study astrophysical phenomena from the far-ultraviolet (FUV) to the near infrared (NIR) will require mirror coatings with high reflectance over this entire spectral region. While coatings for the optical and NIR part of the spectrum are fairly well developed with proven performance, the FUV presents significant challenges. The U.S. Naval Research Laboratory (NRL) has developed a processing system based on an electron beam-generated plasma that provides for controlled fluorination and/or etching of surfaces with near monolayer precision and minimal changes to surface morphology. In this paper, we report recent results of samples treated in the NRL Large Area Plasma Processing System (LAPPS) where restoration of the high intrinsic reflectance in the FUV spectral range have been observed of aluminum (Al) mirrors protected with a magnesium di-fluoride (MgF2) overcoat. This paper will also extend these studies to other un-protected Al mirrors protected to demonstrate the capability of LAPPS to simultaneously etch the native oxide layer from bare Al and passivate the surface with fluorine, leading to marked enhancements in FUV reflectance. Laboratory test data and optical diagnostic techniques used to verify surface scattering and durability of selected coatings will be presented. Finally, we will discuss the scalability of the LAPPS etching process in order to realize these high-reflectivity coatings on mirror segments as large as those proposed for the Large Ultraviolet, Optical, and Infrared (LUVOIR) astronomical telescope system (1+meter class).
The advancement of far-ultraviolet (FUV) coatings is essential to meet the specified throughput requirements of the Large UV/Optical/IR (LUVOIR) Surveyor Observatory which will cover wavelengths down to the 100 nm range. The biggest constraint in the optical thin film coating design is attenuation in the Lyman-Alpha Ultraviolet range of 100-130 nm in which conventionally deposited thin film materials used in this spectral region (e.g., aluminum [Al] protected with Magnesium fluoride [MgF2]) often have high absorption and scatter properties degrading the throughput in an optical system. We investigate the use of optimally deposited aluminum and aluminum tri-fluoride (AlF3) materials for reflecting and solar blind band-pass filter coatings for use in the FUV. Optical characterization of the deposited designs has been performed using UV spectrometry. The optical thin film design and optimal deposition conditions to produce superior reflectance and transmittance using Al and AlF3 are presented.
Large space telescope concepts such as LUVOIR and HabEx aiming for observations from far UV to near IR require advanced coating technologies to enable efficient gathering of light with important spectral signatures including those in far UV region down to 90nm. Typical Aluminum mirrors protected with MgF2 fall short of the requirements below 120nm. New and improved coatings are sought to protect aluminum from oxidizing readily in normal environment causing severe absorption and reduction of reflectance in the deep UV. Choice of materials and the process of applying coatings present challenges. Here we present the progress achieved to date with experimental investigations of coatings at JPL and at GSFC and discuss the path forward to achieve high reflectance in the spectral region from 90 to 300nm without degrading performance in the visible and NIR regions taking into account durability concerns when the mirrors are exposed to normal laboratory environment as well as high humidity conditions. Reflectivity uniformity required on these mirrors is also discussed.
This paper will describe efforts at developing broadband mirror coatings with high performance that will extend from infrared wavelengths down to the Far-Ultraviolet (FUV) spectral region. These mirror coatings would be realized by passivating the surface of freshly made aluminum coatings with fluorine ions in order to form a thin AlF3 overcoat that will protect the aluminum from oxidation and, hence, realize the high-reflectance of this material down to its intrinsic cut-off wavelength of 90 nm. Improved reflective coatings for optics, particularly in the FUV region (90-120 nm), could yield dramatically more sensitive instruments and permit more instrument design freedom.
We present a progress report on the development of new broadband mirror coatings that demonstrate ⪆ 80% reflectivities from 1020−5000Å. Four different coating recipes are presented as candidates for future far-ultraviolet (FUV) sensitive broadband observatories. Three samples were first coated with aluminum (Al) and lithium fluoride (LiF) at the NASA Goddard Space Flight Center (GSFC) using a new high-temperature physical vapor deposition (PVD) process. Two of these samples then had an ultrathin (10−20 Å) protective coat of either magnesium fluoride (MgF2) or aluminum fluoride (AlF3) applied using atomic later deposition (ALD) at the NASA Jet Propulsion Laboratory (JPL). A fourth sample was coated with Al and a similar high temperature PVD coating of AlF3. Polarized reflectivities into the FUV for each sample were obtained through collaboration with the Synchrotron Ultraviolet Radiation Facility at the National Institute of Standards and Technology. We present a procedure for using these reflectivities as a baseline for calculating the optical constants of each coating recipe. Given these results, we describe plans for improving our measurement methodology and techniques to develop and characterize these coating recipes for future FUV missions.
The University of Colorado ultraviolet sounding rocket program presents the motivation and design capabilities of the new Suborbital Imaging Spectrograph for Transition Region Irradiance from Nearby Exoplanet host stars (SISTINE). SISTINE is a pathfinder for future UV space instrumentation, incorporating advanced broadband refl ective mirror coatings and large format borosilicate microchannel plate detectors that address technology gaps identified by the NASA Cosmic Origins program. The optical design capitalizes on new capabilities enabled by these technologies to demonstrate optical pathlengths in a sounding rocket envelope that would otherwise require a prohibitive effective area penalty in the 1020 - 1150 Å bandpass. This enables SISTINE to achieve high signal-to-noise observations of emission lines from planet-hosting dwarf stars with moderate spectral resolution (R ~ 10,000) and sub-arcsecond angular imaging. In this proceedings, we present the scientific motivation for a moderate resolution imaging spectrograph, the design of SISTINE, and the enabling technologies that make SISTINE, and future advanced FUV-sensitive instrumentation, possible.
NASA Cosmic Origins (COR) Program identified the development of high reflectivity mirror coatings for large astronomical telescopes particularly for the far ultra violet (FUV) part of the spectrum as a key technology requiring significant materials research and process development. In this paper we describe the challenges and accomplishments in producing stable high reflectance aluminum mirror coatings with conventional evaporation and advanced Atomic Layer Deposition (ALD) techniques. We present the current status of process development with reflectance of ~ 55 to 80% in the FUV achieved with little or no degradation over a year.
We present the results of a preliminary aging study of new enhanced broadband reflectivity lithium fluoride mirror coatings under development at the thin films laboratory at GSFC. These coatings have demonstrated greater than 80% reflectivity from the Lyman ultraviolet (~1020 Å) to the optical, and have the potential to revolutionize far-ultraviolet instrument design and capabilities. This work is part of a concept study in preparation for the fight qualification of these new coatings in a working astronomical environment. We outline the goals for TRL advancement, and discuss the instrument capabilities enabled by these high reflectivity broadband coatings on potential future space missions. We also present the early design of the first space experiment to utilize these coatings, the proposed University of Colorado sounding rocket payload SISTINE, and show how these new coatings make the science goals of SISTINE attainable on a suborbital platform.
This paper presents and discuss data obtained on a distribution of Al+MgF2 and Al+LiF witness coupons that show substantial gains in reflectance in the far-ultraviolet (FUV) part of the optical spectrum (90−180 nm). These samples, which have dimensions of 2×2 inches, were coated at various locations inside a 2−me diameter coating chamber at the Goddard Space Flight Center in Greenbelt, MD (USA). These experiments were done to demonstrate a scale−up process for coating up to a 1−m diameter optic, and hence realize the gain in throughput that could be obtained for a telescope system that would employ such mirror coatings. These coatings have been optimized for Lyman-alpha (121.6 nm) or lower wavelengths and they are prepared with the deposition of the MgF2 or LiF layers done at elevated (∼ 250 °C) temperature. These results will be compared to ambient or “cold” depositions. We will also present optical characterization of little-studied rare-earth fluorides, such as GdF3 and LuF3, that exhibit low absorption over a broad wavelength range and could therefore be used as high-index materials to produce dielectric coatings at FUV wavelengths.
Modern advanced optical systems often require challenging high spatial frequency surface error control during their
optical fabrication processes. While the large scale surface figure error can be controlled by directed material removal
processes such as small tool figuring, surface finish (<<1mm scales) is controlled with the polishing process. For large
aspheric optical systems, surface shape irregularities of a few millimeters in scale may cause serious performance
degradation in terms of scattered light background noise and high contrast imaging capability. The conventional surface
micro roughness concept in Root Mean Square (RMS) over a very high spatial frequency range (e.g. RMS of 0.5 by 0.5
mm local surface map with 500 by 500 pixels) is not sufficient to describe or specify these surface characteristics. For
various experimental polishing conditions, we investigate the process control for high frequency surface errors with
periods up to ~2-3mm. The Power Spectral Density of the finished optical surfaces has been measured and analyzed to
relate various computer controlled optical surfacing parameters (e.g. polishing interface materials) with the high spatial
frequency errors on the surface. The experiment-based optimal polishing conditions and processes producing a super
smooth optical surface while controlling surface irregularity at the millimeter range are presented.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.