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Jeffrey Lyons
CEO at Infinitesima Ltd
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Publications (1)
Proceedings Article | 20 April 2011 Paper
High-speed atmospheric imaging of semiconductor wafers using rapid probe microscopy
Priyanka Kohli, Jeff Lyons, Andrew D. L. Humphris, Benjamin D. Bunday, Abraham Arceo, Akira Hamaguchi, Dilip Patel, David Bakker
Proceedings Volume 7971, 797119 (2011) https://doi.org/10.1117/12.879456
KEYWORDS: Semiconducting wafers, Image processing, Copper, Microscopy, Scanning electron microscopy, Safety, Semiconductors, Chemical mechanical planarization, Etching, Neodymium
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