Dr. Jeffry J. Sniegowski Profile

Dr. Jeffry J. Sniegowski

VP Production at Sandia National Labs

SPIE Involvement:

Author

Publications (22)

Proceedings Article | 20 October 2004 Paper

Paper

Development, test, and evaluation of MEMS micromirrors for free-space optical communications

Keith Rebello, Bradley Boone, Bernard Kluga, Robert Osiander, Jeffry Sniegowski, Jonathan Bruzzi, Chris Drabenstadt, Steven Rodgers, Margaret Darrin, Eric Rogala

Proceedings Volume 5550, (2004) https://doi.org/10.1117/12.562819

KEYWORDS: Micromirrors, Mirrors, Microelectromechanical systems, Oxides, Digital signal processing, Transmitters, Space operations, CMOS cameras, Charge-coupled devices, Imaging systems

Read Abstract +

SPIE Journal Paper | 1 October 2003 Open Access

Open Access

SURFACE MICROMACHINING

Jeffry Sniegowski, James Smith

JM3, Vol. 2, Issue 04, (October 2003) https://doi.org/10.1117/12.10.1117/1.1616574

Proceedings Article | 30 August 1999 Paper

Paper

Reproducibility data on SUMMiT

Jerome Jakubczak, John McBrayer, Lloyd Irwin, Stephen Montague, James Smith, Harold Stewart, Maarten de Boer, Siv Limary, Jeffry Sniegowski

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361210

KEYWORDS: Resistance, Semiconducting wafers, Oxides, Microelectromechanical systems, Etching, Silicon, Scanning electron microscopy, Diagnostics, Computer aided design, Standards development

Read Abstract +

Proceedings Article | 30 August 1999 Paper

Paper

W-coating for MEMS

Sita Mani, Jeffry Sniegowski, James Fleming

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361215

KEYWORDS: Tungsten, Silicon, Microelectromechanical systems, Coating, Resonators, Oxides, Semiconducting wafers, Photomicroscopy, Chemical vapor deposition, Deposition processes

Read Abstract +

Proceedings Article | 13 October 1998 Paper

Paper

Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing

Dale Hetherington, Jeffry Sniegowski

Proceedings Volume 3440, (1998) https://doi.org/10.1117/12.326692

KEYWORDS: Chemical mechanical planarization, Oxides, Micromirrors, Mirrors, Surface finishing, Adaptive optics, Polishing, Photography, Profilometers, Chemical elements

Read Abstract +

Proceedings Article | 8 September 1998 Paper

Paper

Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology

Samuel Miller, Mial Warren, James Smith, Jeffry Sniegowski, Paul McWhorter, M. Steven Rodgers, Dale Hetherington

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323889

KEYWORDS: Complex systems, Reliability

Read Abstract +

Proceedings Article | 31 August 1998 Paper

Paper

Thin Teflon-like films for MEMS: film properties and reliability studies

Bradley Smith, Craig Brown, Glen LaVigne, Jeffry Sniegowski

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324289

KEYWORDS: Plasma, Semiconducting wafers, FT-IR spectroscopy, Electrodes, Diffusion, Thin films, Microelectromechanical systems, Water, Reactive ion etching, Silicon

Read Abstract +

Proceedings Article | 8 June 1998 Paper

Paper

Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications

Jeffry Sniegowski, Michael Cresswell, Rathindra Ghoshtagore, Richard Allen, Loren Linholm

Proceedings Volume 3332, (1998) https://doi.org/10.1117/12.308722

KEYWORDS: Semiconducting wafers, Silicon, Resistance, Oxides, Critical dimension metrology, Resistors, Information operations, Bridges, Metrology, Photomasks

Read Abstract +

Proceedings Article | 20 April 1998 Paper

Paper

Combined photonics and MEMS function demonstration

Richard Carson, Jeffry Sniegowski, Olga Blum-Spahn, Kent Choquette, Mial Warren, Hong Hou, M. Steven Rodgers

Proceedings Volume 3286, (1998) https://doi.org/10.1117/12.305469

KEYWORDS: Microelectromechanical systems, Vertical cavity surface emitting lasers, Camera shutters, Photonics, Silicon, Solar cells, Gold, Microsystems, Actuators, Packaging

Read Abstract +

Proceedings Article | 5 September 1997 Paper

Paper

Advanced micromechanisms in a multilevel polysilicon technology

Samuel Miller, Jeffry Sniegowski, Paul McWhorter, Carole Craig Barron, M. Steven Rodgers

Proceedings Volume 3224, (1997) https://doi.org/10.1117/12.284507

KEYWORDS: Surface micromachining, Assembly equipment, Optical design, Optical components, Mechanical engineering, Reliability, Mirrors, Camera shutters

Read Abstract +

Proceedings Article | 5 September 1997 Paper

Paper

SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

M. Steven Rodgers, M. Adrian Michalicek, Brady Davies, Jeffry Sniegowski, John Comtois, Carole Craig Barron

Proceedings Volume 3223, (1997) https://doi.org/10.1117/12.284476

KEYWORDS: Microelectromechanical systems, Prototyping, Micromachining, Chemical mechanical planarization, Oxides

Read Abstract +

Proceedings Article | 5 September 1997 Paper

Paper

Routes to failure in rotating MEMS devices experiencing sliding friction

Jeffry Sniegowski, J. Waters, Paul McWhorter, Glen LaVigne, Samuel Miller, M. Steven Rodgers

Proceedings Volume 3224, (1997) https://doi.org/10.1117/12.284523

KEYWORDS: Microelectromechanical systems

Read Abstract +

Proceedings Article | 2 September 1997 Paper

Paper

SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Carole Craig Barron, Jeffry Sniegowski, Brady Davies, M. Steven Rodgers

Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284568

KEYWORDS: Microelectromechanical systems, Computer aided design, Prototyping, Chemical mechanical planarization, Surface micromachining, Custom fabrication, Manufacturing, Silicon

Read Abstract +

Proceedings Article | 23 September 1996 Paper

Paper

Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

Stephen Montague, James Smith, James Murray, Ronald Manginell, Robert Huber, Paul McWhorter, Jeffry Sniegowski

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251218

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Manufacturing, Resistance, Microelectronics, Hydrogen, Signal processing, Electronics, Platinum, Packaging

Read Abstract +

Proceedings Article | 23 September 1996 Paper

Paper

Chemical-mechanical polishing: enhancing the manufacturability of MEMS

Jeffry Sniegowski

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251237

KEYWORDS: Chemical mechanical planarization, Microelectromechanical systems, Manufacturing, Surface micromachining, Microelectronics, Semiconducting wafers, Oxides, Sensors, Silicon, Etching

Read Abstract +

Proceedings Article | 17 September 1996 Paper

Paper

Performance trade-offs for a surface micromachined microengine

Samuel Miller, Glen LaVigne, Paul McWhorter, Jeffry Sniegowski

Proceedings Volume 2882, (1996) https://doi.org/10.1117/12.250702

KEYWORDS: Performance modeling

Read Abstract +

Proceedings Article | 21 May 1996 Paper

Paper

Electrical test structures replicated in silicon-on-insulator material

Loren Linholm, Richard Allen, Jeffry Sniegowski, John Villarrubia, Michael Cresswell, Rathindra Ghoshtagore

Proceedings Volume 2725, (1996) https://doi.org/10.1117/12.240117

KEYWORDS: Silicon, Etching, Semiconducting wafers, Metrology, Photomasks, Crystals, Oxides, Silicon films, Calibration, Optical lithography

Read Abstract +

Proceedings Article | 20 May 1996 Paper

Paper

Integrated mold/surface-micromachining process

Stephen Montague, Jeffry Sniegowski, Dale Hetherington, Carole Craig Barron, James Fleming

Proceedings Volume 2722, (1996) https://doi.org/10.1117/12.240455

KEYWORDS: Silicon, Etching, Micromachining, Microelectronics, Surface micromachining, Chemical mechanical planarization, Oxides, Electronics, Microelectromechanical systems, Reactive ion etching

Read Abstract +

Proceedings Article | 20 May 1996 Paper

Paper

Friction in surface-micromachined microengines

Jeffry Sniegowski, Paul McWhorter, Samuel Miller, Glen LaVigne

Proceedings Volume 2722, (1996) https://doi.org/10.1117/12.240444

KEYWORDS: Microelectromechanical systems, Reliability, Actuators, Solids, Francium, Data modeling, Systems modeling, Temperature metrology, Dielectrics, Lanthanum

Read Abstract +

Proceedings Article | 19 September 1995 Paper

Paper

Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

Stephen Montague, Jeffry Sniegowski, James Smith

Proceedings Volume 2639, (1995) https://doi.org/10.1117/12.221301

KEYWORDS: Tungsten, Microelectronics, Semiconducting wafers, Electronics, Resistance, Aluminum, Diffusion, Manufacturing, Silicon, Tin

Read Abstract +

Proceedings Article | 26 May 1995 Paper

Paper

Micromachined sensor and actuator research at the Microelectronics Development Laboratory

Jeffry Sniegowski, James Fleming, Stephen Montague, James Smith, Bradley Smith, Carole Craig Barron, J. Rodriguez

Proceedings Volume 2448, (1995) https://doi.org/10.1117/12.210458

KEYWORDS: Sensors, Actuators, Electronics, Microelectronics, CMOS technology, Surface micromachining, Tungsten, Control systems, Silicon, Hydrogen

Read Abstract +

Proceedings Article | 12 May 1995 Paper

Paper

Microfabricated actuators and their application to optics

Jeffry Sniegowski, Ernest Garcia

Proceedings Volume 2383, (1995) https://doi.org/10.1117/12.209053

KEYWORDS: Actuators, Microactuators, Surface micromachining, Etching, Optical components, Microelectromechanical systems, Silicon, Oxides, Photomicroscopy, Capacitors

Read Abstract +

Showing 5 of 22 publications

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement